新型光学交流量热法准确测量小尺寸样品的面内热导率
华中科技大学, 能源与动力工程学院, 湖北武汉 430074
| 摘 要： | 传统的交流量热法可以准确测量悬空薄膜样品的面内热扩散率，但由于受样品尺寸要求的限制而不能用于测量小尺寸薄膜或块体材料。本文提出一种新型的光学交流量热法，采用一束调制的连续波激光对样品进行周期性加热，另一束连续波激光基于热反射原理对样品表面距离加热激光不同位置处的温度响应进行探测。由于基于光学的新型交流量热法采用了高度聚焦的、直径仅为微米级的激光进行测量，而且采用了最新的多层结构三维各向异性传热模型分析处理实验信号，因此该方法可以准确测量亚毫米级小尺寸悬空薄膜、支撑薄膜或块体材料的面内热导率，测量误差小于5%。本文详细介绍了该方法的实验原理、测量装置、信号采集、数据处理及误差分析方法，通过对蓝宝石标准样品的测量示例了该方法的应用，并比较了交流量热法中相位法和幅值法的异同。文章最后综合比较了该方法与其它几种相似的光学热测量技术的优缺点。 |
| 关 键 词： | 光学交流量热法; 面内热导率; 热反射法; 小尺寸样品; 幅值法; 相位法 |
| DOI： | 10.57237/j.jest.2022.01.006 |
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收稿日期: 2022-12-06
接受日期: 2023-01-30
在线出版日期: 2023-02-03
A Novel Optical-Based AC Calorimetry Method to Measure In-Plane Thermal Conductivity of Small-Scale Samples
School of Power and Energy Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| Abstract: | Conventional ac-calorimetry method could accurately measure the in-plane thermal diffusivity of suspended thin films but cannot be applied to small-scale samples due to the large sample size required by this method. This work proposes a novel optical-based ac-calorimetry method that circumvents the limitations of the conventional ac-calorimetry method. This new method uses a modulated continuous-wave laser to heat the sample periodically, and another continuous-wave laser to detect the sample’s temperature response on the surface at different distances from the heating spot via the principle of thermoreflectance. Since this method uses highly focused laser beams with micrometer-scale spot diameters for optical heating and temperature sensing, and this method uses the state-of-the-art thermal model of 3D anisotropic multilayers for signal processing, this method can accurately measure the in-plane thermal conductivity of suspended and supported thin films and bulk materials with sub-millimeter-scale lateral sizes, with a typical measurement uncertainty of less than 5%. This paper describes the details of this technique, including the basic principle, test device, signal acquisition, data processing, and uncertainty analysis. This technique is demonstrated through measurements of a standard sapphire sample, with the phase and amplitude approaches of ac-calorimetry compared. This technique is also compared with some other related optical-based thermal methods for their pros and cons in the end. |
| Keywords: | Optical-based AC Calorimetry; In-Plane Thermal Conductivity; Thermoreflectance; Small-Scale Sample; Amplitude Approach; Phase Approach |
基金
| 1. | 华中科技大学新进教师科研启动基金 (3004120159). |
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